樹人論文網一個專業的學術咨詢網站?。。?/div>

Journal of Micro-Nanolithography MEMS and MOEMS

來源：樹人論文網瀏覽次數：330次

創刊時間：2007

周期：Quarterly

ISSN：1932-5150

影響因子：1.193

是否開源：No

年文章量：77

錄用比：容易

學科方向：工程：電子與電氣

研究方向：工程技術

通訊地址：SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS, 1000 20TH ST, PO BOX 10, BELLINGHAM, USA, WA, 98225

官網地址：http://www.spie.org/publications/journals/journal-of-micro/nanolithography-mems-and-moems

投稿地址：https://jm3.msubmit.net/cgi-bin/main.plex

網友分享經驗：較慢,6-12周

Journal of Micro-Nanolithography MEMS and MOEMS雜志中文介紹

《微納米光刻機MEMS和MOEMS雜志》（JM3）發表了有關光刻、制造、包裝和集成技術的科學、發展和實踐的論文，以滿足電子、MEMS、MOEMS和光子學行業的需要。這類裝置的范圍很廣，包括生物醫學微裝置、微流體、傳感器和執行器、自適應光學和數字微鏡。范圍廣泛，有助于促進期刊服務的社區之間的協同作用和利益。

Journal of Micro-Nanolithography MEMS and MOEMS雜志英文介紹

The Journal of Micro-Nanolithography MEMS and MOEMS (JM3) publishes papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, MEMS, MOEMS, and photonics industries. The wide range of such devices includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal.